On-Chip Integration of Pt/(Ba,Sr)TiO3/Pt Thin Film Capacitors

Author： Liedtke R.   Hoffmann M.   Boettger U.   Waser R.  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.48, Iss.1, 2002-01, pp. : 245-254

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