Preparation and Characterizations of High-K (Ca, Sr)ZrO3 Gate Dielectric Thin Films by Sol-Gel Technology

Author： ZHU W.   YU T.   CHEN C.   CHEN X.   KRISHNAN R.  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.61, Iss.1, 2004-01, pp. : 25-35

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