Recent Progress of Liquid Source Misted-Chemical Deposition System for Ferroelectric Materials

Author: TATSUTA TOSHIAKI   KAWASAKI SUSUMU   MOTOYAM SHIN-ICH   TSUJI OSAMU   SIOSAKI TADASHI  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.62, Iss.1, 2004-01, pp. : 129-132

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