FABRICATION OF PZT THIN FILMS WITH TiO x BUFFER LAYERS BY RF MAGNETRON SPUTTERING

Author： ZHONG CHAOWEI   PENG JIAGEN   ZHANG SHUREN   ZHANG WANGLI  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.80, Iss.1, 2006-11, pp. : 281-288

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