PIEZOELECTRIC 2D-OPTICAL MICRO SCANNERS WITH PZT THICK FILMS

By YASUDA Y.   AKAMATSU M.   TANI M.   IIJIMA T.   TOSHIYOSHI H.  

Integrated Ferroelectrics, Vol. 76, Iss. 1, 2005-11 ,pp. : 81-91

Taylor & Francis Ltd

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Apparent Reduction in the Value of the d33 Piezoelectric Coefficient in PZT Thick Films

By Dorey R. A.   Whatmore R. W.  

Integrated Ferroelectrics, Vol. 50, Iss. 1, 2002-01 ,pp. : 111-119

Taylor & Francis Ltd

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Patterned crack-free PZT thick films for micro-electromechanical system applications

By Dauchy F.   Dorey R.  

The International Journal of Advanced Manufacturing Technology, Vol. 33, Iss. 1-2, 2007-05 ,pp. : 86-94

Springer Publishing Company

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Piezoelectric Coefficients of PZT Thin Films

By Tsang R. C. W.   Kwok K. W.   Chan H. L. W.   Choy C. L.  

Integrated Ferroelectrics, Vol. 50, Iss. 1, 2002-01 ,pp. : 143-148

Taylor & Francis Ltd

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DESIGN AND OPTIMIZATION OF MICRO SCANNER DRIVEN BY FOLDED PIEZOELECTRIC UNIMORPH ACTUATORS USING PZT FILMS

By FANG HUAJUN   LIU LITIAN   WU XIAOMING   ZHANG NINGXIN   REN TIANLING  

Integrated Ferroelectrics, Vol. 76, Iss. 1, 2005-11 ,pp. : 23-30

Taylor & Francis Ltd

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