DOUBLE-SIDED PZT FILMS ON PLATINIZED SI: FILM PREPARATION, STRUCTURAL AND PIEZOELECTRIC PROPERTIES

Author: Zhong Jian   Kotru Sushma   Han Hui   Pandey Raghvendra Kumar  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.92, Iss.1, 2007-08, pp. : 123-134

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