Simultaneous determination of the thermal expansion coefficient and the elastic modulus of Ta2O5 thin film using phase shifting interferometry

Author： Tien Chuen-Lin   Jaing Cheng-Chung   Lee Cheng-Chung   Chuang Kie-Pin  

Publisher： Taylor & Francis Ltd

ISSN： 1362-3044

Source： Journal of Modern Optics, Vol.47, Iss.10, 2000-08, pp. : 1681-1691

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