Rigorous and approximate analysis of metallic gratings in soft X-ray and EUV regions

Author: Vallius Tuomas   Turunen Jari   Vahimaa Pasi  

Publisher: Taylor & Francis Ltd

ISSN: 1362-3044

Source: Journal of Modern Optics, Vol.51, Iss.14, 2004-09, pp. : 2047-2057

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Abstract