High resolution material ablation and deposition with femtosecond lasers and applications to photomask repair

Author： Haight Richard   Wagner Alfred   Longo Peter   Lim Daeyoung  

Publisher： Taylor & Francis Ltd

ISSN： 1362-3044

Source： Journal of Modern Optics, Vol.51, Iss.16-18, 2004-01, pp. : 2781-2796

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