Defects in silicon induced by high energy helium implantation and their evolution during anneals

Author： Beaufort M. F. Oliviero E. Garem H. Blanchard C. Barbot J. F. Godey S. Ntsoenzok E.

ISSN： 1463-6417

Source： Philosophical Magazine B, Vol.80, Iss.11, 2000-11, pp. : 1975-1985

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