Plasma-enhanced chemical vapour deposition of microcrystalline silicon: on the dynamics of the amorphous-microcrystalline interface by optical methods

Author: Summonte C.   Rizzoli R.   Desalvo A.   Zignani F.   Centurioni E.   Pinghini R.   Bruno G.   Losurdo M.   Capezzuto P.   Gemmi M.  

Publisher: Taylor & Francis Ltd

ISSN: 1463-6417

Source: Philosophical Magazine B, Vol.80, Iss.4, 2000-04, pp. : 459-473

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