Surface microcharacterization of silicon wafers by the light-beam-induced current technique in the planar configuration and by attenuated total reflection spectroscopy

Author: Spadoni S.   Acciarri M.   Narducci D.   Pizzini S.  

Publisher: Taylor & Francis Ltd

ISSN: 1463-6417

Source: Philosophical Magazine B, Vol.80, Iss.4, 2000-04, pp. : 579-585

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract