Effect of Sputtering Power on the Physical Properties of Cu3N films Formed by DC Magnetron Sputtering

Author： Reddy K. Venkata Subba Uthanna S.

ISSN： 1553-3174

Source： Synthesis and Reactivity in Inorganic, Metal-Organic, and Nano-Metal Chemistry, Vol.37, Iss.6, 2007-07, pp. : 393-395

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