Cracking and loss of adhesion of Si3N4 and SiO2:P films deposited on Al substrates

Author: Scafidi P.   Ignat M.  

Publisher: Taylor & Francis Ltd

ISSN: 1568-5616

Source: Journal of Adhesion Science and Technology, Vol.12, Iss.11, 1998-01, pp. : 1219-1242

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