Monte Carlo study of backscattered electron signals from microstructures of x-ray masks

Author： Yasuda M.   Fujii K.   Kawata H.   Murata K.  

Publisher： Urban & Fischer

ISSN： 0030-4026

Source： Optik – International Journal for Light and Electron Optics, Vol.112, Iss.8, 2001-10, pp. : 321-328

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