Differential algebraic method for arbitrary-order aberration analysis of combined electron beam focusing-deflection systems

Author: Wang L-P.   Tang T-T.   Cheng B-J.   Cleaver J.A.  

Publisher: Urban & Fischer

ISSN: 0030-4026

Source: Optik – International Journal for Light and Electron Optics, Vol.113, Iss.4, 2002-07, pp. : 181-187

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Abstract