Surface roughness measurement of semi-conductor wafers using a modified total integrated scattering model

Author： Tay C.J.   Wang S.H.   Quan C.   Ng C.K.  

Publisher： Urban & Fischer

ISSN： 0030-4026

Source： Optik – International Journal for Light and Electron Optics, Vol.113, Iss.7, 2002-09, pp. : 317-321

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