Optimization of white light interferometry on rough surfaces based on error analysis

Author: Saraç Zehra   Groß Reinhard   Richter Claus   Wiesner Bernhard   Häusler Gerd  

Publisher: Urban & Fischer

ISSN: 0030-4026

Source: Optik – International Journal for Light and Electron Optics, Vol.115, Iss.8, 2004-10, pp. : 351-357

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Abstract