Control of particle flux and energy on substrate in an inverted cylindrical magnetron for plasma PVD

Author： Todoran A   Mantel M   Bés A   Vachey C   Lacoste A  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.23, Iss.6, 2014-12, pp. : 65039-65045

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