High-Pressure Water-Vapor Annealing for Enhancement of a-Si:H Film Passivation of Silicon Surface

Author： Chun-Lin Guo Lei Wang Yan-Rong Zhang Hai-Feng Zhou Feng Liang Zhen-Hui Yang De-Ren Yang

ISSN： 0256-307X

Source： Chinese Physics Letters, Vol.31, Iss.10, 2014-10, pp. : 108501-108504

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