Selective area in situ conversion of Si (0 0 1) hydrophobic to hydrophilic surface by excimer laser irradiation in hydrogen peroxide

Author： Liu Neng Huang Xiaohuan Dubowski Jan J

Publisher： IOP Publishing

ISSN： 0022-3727

Source： Journal of Physics D: Applied Physics, Vol.47, Iss.38, 2014-09, pp. : 385106-385114

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