Study of a vibrating fiber probing system for 3-D micro-structures: performance improvement

Author： Murakami H   Katsuki A   Sajima T   Suematsu T  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.25, Iss.9, 2014-09, pp. : 94010-94016

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