Concurrent measurement method of spindle radial, axial and angular motions using concentric circle grating and phase modulation interferometers

Author： Madden Muhummad Aketagawa Masato Kumagai Takuya Maeda Yoshitaka Okuyama Eiki

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.25, Iss.9, 2014-09, pp. : 94005-94015

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