3-D micro surface profilometry employing novel Mirau-based lateral scanning interferometry

Author： Chen Liang-Chia   Le Manh-Trung   Lin Yi-Shiuan  

Publisher： IOP Publishing

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.25, Iss.9, 2014-09, pp. : 94004-94010

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Novel 3-D free-form surface profilometry for reverse engineering

By  

Journal of Physics: Conference Series , Vol. 13, Iss. 1, 2005-01 ,pp. : 174-177

IOP Publishing

Access to resources Recommend Favorite

Development of dynamic 3-D surface profilometry using stroboscopic interferometric measurement and vertical scanning techniques

By  

Journal of Physics: Conference Series , Vol. 13, Iss. 1, 2005-01 ,pp. : 51-54

IOP Publishing

Access to resources Recommend Favorite

A micro-displacement stage for scanning white-light interferometry

By  

Journal of Physics: Conference Series , Vol. 13, Iss. 1, 2005-01 ,pp. : 94-97

IOP Publishing

Access to resources Recommend Favorite

Underwater 3D Surface Measurement Using Fringe Projection Based Scanning Devices

By Bräuer-Burchardt Christian   Heinze Matthias   Schmidt Ingo   Kühmstedt Peter   Notni Gunther  

Sensors, Vol. 16, Iss. 1, 2015-12 ,pp. : 13-13

MDPI

Access to resources Recommend Favorite

Full-field micro surface profilometry using digital fringe projection with spatial encoding principle

By  

Journal of Physics: Conference Series , Vol. 13, Iss. 1, 2005-01 ,pp. : 147-150

IOP Publishing

Access to resources Recommend Favorite