High-permittivity metal-insulator-metal capacitors with TiO2 rutile dielectric and RuO2 bottom electrode
Publisher: IOP Publishing
ISSN: 1757-899X
Source: IOP Conference Series: Materials Science and Engineering, Vol.8, Iss.1, 2010-02, pp. : 113-116
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract