Study of ZrO2/Al2O3/ZrO2 and Al2O3/ZrO2/Al2O3 stack structures deposited by sol-gel method on Si

Publisher: IOP Publishing

ISSN: 1757-899X

Source: IOP Conference Series: Materials Science and Engineering, Vol.8, Iss.1, 2010-02, pp. : 126-129

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