Accurate calibration for the quantification of the Al content in AlGaN epitaxial layers by energy-dispersive X-ray spectroscopy in a Transmission Electron Microscope

Publisher: IOP Publishing

ISSN: 1742-6596

Source: Journal of Physics: Conference Series , Vol.326, Iss.1, 2011-11, pp. : 181-186

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract