Comparative analysis of electrophysical properties of ceramic tantalum pentoxide coatings, deposited by electron beam evaporation and magnetron sputtering methods

Publisher： IOP Publishing

ISSN： 1742-6596

Source： Journal of Physics: Conference Series , Vol.558, Iss.1, 2014-12, pp. : 275-280

Access to resources Favorite

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract

Related content

Magnetron sputtering system for coatings deposition with activation of working gas mixture by low-energy high-current electron beam

By  

Journal of Physics: Conference Series , Vol. 652, Iss. 1, 2015-11 ,pp. : 132-137

IOP Publishing

Access to resources Recommend Favorite

Lead titanate coatings on optical fibers deposited by reactive magnetron sputtering

By  

Le Journal de Physique IV, Vol. 08, Iss. PR9, 1998-12 ,pp. : Pr9-179-Pr9-182

Edp Sciences

Access to resources Recommend Favorite

Proton conductive tantalum oxide thin film deposited by reactive DC magnetron sputtering for all-solid-state switchable mirror

By  

Journal of Physics: Conference Series , Vol. 100, Iss. 8, 2008-03 ,pp. : 69-72

IOP Publishing

Access to resources Recommend Favorite

Physical properties of zirconium oxynitride films deposited by reactive magnetron sputtering

By  

Journal of Physics: Conference Series , Vol. 100, Iss. 8, 2008-03 ,pp. : 206-209

IOP Publishing

Access to resources Recommend Favorite

Structure and properties of Ti-B-N, Ti-Cr-B-(N), and Cr-B-(N) coatings deposited by magnetron sputtering of targets prepared by self-propagating high-temperature synthesis

By Shtansky D.   Kiryukhantsev-Korneev F.   Sheveiko A.   Bashkova I.   Malochkin O.   Levashov E.   D’yakonova N.   Lyasotsky I.  

Physics of the Solid State, Vol. 47, Iss. 2, 2005-02 ,pp. : 252-262

MAIK Nauka/Interperiodica

Access to resources Recommend Favorite