Publisher: IOP Publishing
ISSN: 1742-6596
Source: Journal of Physics: Conference Series , Vol.113, Iss.1, 2008-05, pp. : 46-49
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
2D fluid-model simulations of plasma expansion
Journal of Physics: Conference Series , Vol. 113, Iss. 1, 2008-05 ,pp. :
3D model of the magnetic filter region in tandem plasma sources
Journal of Physics: Conference Series , Vol. 223, Iss. 1, 2010-04 ,pp. :
Développement d'une source EUV plasma laserpour la micro-lithographie
Le Journal de Physique IV, Vol. 108, Iss. issue, 2003-06 ,pp. :