Publisher: IOP Publishing
E-ISSN: 1361-6404|36|2|25017-25026
ISSN: 0143-0807
Source: European Journal of Physics, Vol.36, Iss.2, 2015-03, pp. : 25017-25026
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Abstract
Ellipsometry is an important and non-destructive technique to measure the optical constants and thicknesses of layered materials. This technique is based on the simple idea of changes in the polarization state of light upon reflection from the sample surface. However, commercial ellipsometers are rather complicated and expensive devices that are not the best choice for learning the principles of ellipsometry. They usually require precise measurements of the angular position of polarization-sensitive components, such as polarisers and wave retarders. In this paper we demonstrate a simple ellipsometer which uses the concept of Stokes parameters to fully determine the polarization state of the reflected light by measuring the relative intensities at four positions of the analyser. We also describe the essential steps in analysing the ellipsometry data, and provide three real-world examples. The film thickness and index of refraction of layered samples are measured with reasonable accuracy. This work is the result of a graduate-level physics project and can easily be implemented in an educational optics laboratory to help graduate students better understand and use the concepts of light polarization, Stokes parameters, and ellipsometry.
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