STEM–EELS analysis reveals stable high-density He in nanopores of amorphous silicon coatings deposited by magnetron sputtering

Publisher： IOP Publishing

E-ISSN： 1361-6528|26|7|75703-75712

ISSN： 0957-4484

Source： Nanotechnology, Vol.26, Iss.7, 2015-02, pp. : 75703-75712

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