Strain analysis of free-standing strained silicon-on-insulator nanomembrane

Author： Gao-Di Sun   Lin-Xi Dong   Zhong-Ying Xue   Da Chen   Qing-Lei Guo   Zhi-Qiang Mu  

Publisher： IOP Publishing

E-ISSN： 1741-4199|24|3|36801-36805

ISSN： 1674-1056

Source： Chinese Physics B, Vol.24, Iss.3, 2015-03, pp. : 36801-36805

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