Effect of the anisotropy of monocrystalline silicon mechanical properties on the dynamic characteristics of a micromechanical gyroscope

Publisher： IOP Publishing

E-ISSN： 1757-899X|81|1|594-601

ISSN： 1757-899X

Source： IOP Conference Series: Materials Science and Engineering, Vol.81, Iss.1, 2015-04, pp. : 594-601

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