Effect of por-SiC buffer layer on the parameters of thin Er2O3 layers on silicon carbide substrates

Publisher: IOP Publishing

E-ISSN: 1757-899X|81|1|121-125

ISSN: 1757-899X

Source: IOP Conference Series: Materials Science and Engineering, Vol.81, Iss.1, 2015-04, pp. : 121-125

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