Preparation of AlN thin films by nitridation of Al-coated Si substrate

By Huang J.   Wang L.   Shen Q.   Lin C.   Ostling M.  

Thin Solid Films, Vol. 340, Iss. 1, 1999-02 ,pp. : 137-139

Elsevier

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Preparation and properties of TiN and AlN films from alkoxide solution by thermal plasma CVD method

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Preparation of AlN fine powder by thermal plasma processing

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Thin Solid Films, Vol. 316, Iss. 1, 1998-03 ,pp. : 189-194

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Control of preferential orientation of AlN films prepared by the reactive sputtering method

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Preparation of [002] oriented AlN thin films by mid frequency reactive sputtering technique

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