Ga+ implantation in a PZT film during focused ion beam micro‐machining

E-ISSN： 1610-1642|12|3|314-317

ISSN： 1862-6351

Source： PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Vol.12, Iss.3, 2015-03, pp. : 314-317

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