A Vertical Deformation Mechanics Model for Proof-Mass in Micro-Machined SOI Comb Finger Accelerometers

E-ISSN： 1876-4037|3|4|326-330

ISSN： 1876-4029

Source： Micro and Nanosystems, Vol.3, Iss.4, 2011-12, pp. : 326-330

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