Effects of fast atoms and energy-dependent secondary electron emission yields in PIC/MCC simulations of capacitively coupled plasmas

Author: Derzsi A   Korolov I   Schüngel E   Donkó Z   Schulze J  

Publisher: IOP Publishing

E-ISSN: 1361-6595|24|3|34002-34015

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.24, Iss.3, 2015-05, pp. : 34002-34015

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Abstract