Micro packaged MEMS pressure sensor for intracranial pressure measurement

Author： Xiong Liu   Yan Yao   Jiahao Ma   Yanhang Zhang   Qian Wang   Zhaohua Zhang   Tianling Ren  

Publisher： IOP Publishing

ISSN： 1674-4926

Source： Journal of Semiconductors, Vol.36, Iss.6, 2015-06, pp. : 64009-64012

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