Towards a full integration of vertically aligned silicon nanowires in MEMS using silane as a precursor

Author： Gadea G   Morata A   Santos J D   Dávila D   Calaza C   Salleras M   Fonseca L   Tarancón A  

Publisher： IOP Publishing

E-ISSN： 1361-6528|26|19|195302-195314

ISSN： 0957-4484

Source： Nanotechnology, Vol.26, Iss.19, 2015-05, pp. : 195302-195314

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