Author: Detz H Kriz M MacFarland D Lancaster S Zederbauer T Capriotti M Andrews A M Schrenk W Strasser G
Publisher: IOP Publishing
E-ISSN: 1361-6528|26|31|315601-315608
ISSN: 0957-4484
Source: Nanotechnology, Vol.26, Iss.31, 2015-08, pp. : 315601-315608
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
Electrothermal Actuators for SiO2 Photonic MEMS
By Peters Tjitte-Jelte Tichem Marcel
Micromachines, Vol. 7, Iss. 11, 2016-11 ,pp. :