Implications of electron heating and non-uniformities in a VHF-CCP for sterilization of medical instruments

Author： Stapelmann Katharina   Fiebrandt Marcel   Styrnoll Tim   Baldus Sabrina   Bibinov Nikita   Awakowicz Peter  

Publisher： IOP Publishing

E-ISSN： 1361-6595|24|3|34014-34022

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.24, Iss.3, 2015-06, pp. : 34014-34022

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