Author: Avrutin E A Ryvkin B S Kostamovaara J T Kuksenkov D V
Publisher: IOP Publishing
E-ISSN: 1361-6641|30|5|55006-55012
ISSN: 0268-1242
Source: Semiconductor Science and Technology, Vol.30, Iss.5, 2015-05, pp. : 55006-55012
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Abstract