Optical emission spectroscopy system operating in the vacuum-ultraviolet spectral range λ < 100 nm—a semi-empirical determination of sensitivity

Author： Carman Robert J   Little Douglas J   Kane Deborah M  

Publisher： IOP Publishing

E-ISSN： 1361-6501|26|8|85203-85207

ISSN： 0957-0233

Source： Measurement Science and Technology, Vol.26, Iss.8, 2015-08, pp. : 85203-85207

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