MIKES’ primary phase stepping gauge block interferometer

Author: Byman V   Lassila A  

Publisher: IOP Publishing

E-ISSN: 1361-6501|26|8|84009-84017

ISSN: 0957-0233

Source: Measurement Science and Technology, Vol.26, Iss.8, 2015-08, pp. : 84009-84017

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Abstract