![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
Author: Komuro Atsushi Takahashi Kazunori Ando Akira
Publisher: IOP Publishing
E-ISSN: 1361-6463|48|21|215203-215211
ISSN: 0022-3727
Source: Journal of Physics D: Applied Physics, Vol.48, Iss.21, 2015-06, pp. : 215203-215211
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
By Murakami Tomoyuki Niemi Kari Gans Timo O'Connell Deborah Graham William G
Plasma Sources Science and Technology, Vol. 22, Iss. 4, 2013-08 ,pp. :