Diagnostics of Metal Plasma in Radio Frequency Glow Discharge during Electron Beam Evaporation

Publisher： IOP Publishing

E-ISSN： 1741-3540|32|8|85201-85205

ISSN： 0256-307X

Source： Chinese Physics Letters, Vol.32, Iss.8, 2015-01, pp. : 85201-85205

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