Surface Acoustic Wave Humidity Sensors Based on &$(11bar{2}0)$; ZnO Piezoelectric Films Sputtered on R-Sapphire Substrates

Publisher： IOP Publishing

E-ISSN： 1741-3540|32|8|86802-86805

ISSN： 0256-307X

Source： Chinese Physics Letters, Vol.32, Iss.8, 2015-01, pp. : 86802-86805

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