An equivalent method of multi-beam laser interference lithography for 2D plasmonic crystals fabrication

Publisher: IOP Publishing

E-ISSN: 2040-8986|17|8|85001-85006

ISSN: 2040-8986

Source: Journal of Optics, Vol.17, Iss.8, 2015-08, pp. : 85001-85006

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Abstract