Chemical understanding and utility of H3PO4 etching of group‐III‐ nitrides

E-ISSN： 1521-3951|252|5|1121-1126

ISSN： 0370-1972

Source： PHYSICA STATUS SOLIDI (B) BASIC SOLID STATE PHYSICS, Vol.252, Iss.5, 2015-05, pp. : 1121-1126

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